Managing Heat Loss Around a Wafer Heater for More Stable Operation

https://engineered-thermal-hub.capitaljays.com/posts/ito-glass-heater-integration-tips-for-transparent-equipment-surfaces

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result